Trichlorofluorosilane

Trichlorofluorosilane
Names
Systematic IUPAC name
Trichloro(fluoro)silane
Other names
Silicon trichloride fluoride
Identifiers
ChemSpider
Properties
SiCl3F
Molar mass 153.43 g/mol
Density 1.477g/cm3
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
Infobox references

Trichlorofluorosilane (Silicon trichloride fluoride) is an inorganic compound. It is used to produce silicon for use in the manufacturing of semiconductor and fiber optic materials.[1]

References

  1. ^ "Preparation of mixed-halogen halo-silanes, US 7030260 B2". Retrieved 11 October 2013.
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